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1

Formation mechanism of concave by dielectric breakdown on silicon carbide metal-oxide-semiconductor capacitor

Sato, Soshi, Yamabe, Kikuo, Endoh, Tetsuo, Niwa, Masaaki

Journal:

Microelectronics Reliability

Year:

2016

Language:

english

File:

PDF, 1.87 MB

english, 2016

2

Time-dependent dielectric breakdown (TDDB) distribution in n-MOSFET with HfSiON gate dielectrics under DC and AC stressing

Hirano, Izumi, Nakasaki, Yasushi, Fukatsu, Shigeto, Goto, Masakazu, Nagatomo, Koji, Inumiya, Seiji, Sekine, Katsuyuki, Mitani, Yuichiro, Yamabe, Kikuo

Journal:

Microelectronics Reliability

Year:

2013

Language:

english

File:

PDF, 1.08 MB

english, 2013

3

Flattening of oxidized diamond (111) surfaces with H2SO4/H2O2 solutions

Tokuda, Norio, Takeuchi, Daisuke, Ri, Sung-Gi, Umezawa, Hitoshi, Yamabe, Kikuo, Okushi, Hideyo, Yamasaki, Satoshi

Journal:

Diamond and Related Materials

Year:

2009

Language:

english

File:

PDF, 465 KB

english, 2009

4

Surface roughening of diamond (001) films during homoepitaxial growth in heavy boron doping

Tokuda, Norio, Umezawa, Hitoshi, Saito, Takeyasu, Yamabe, Kikuo, Okushi, Hideyo, Yamasaki, Satoshi

Journal:

Diamond and Related Materials

Year:

2007

Language:

english

File:

PDF, 686 KB

english, 2007

5

Growth of atomically step-free surface on diamond {111} mesas

Tokuda, Norio, Umezawa, Hitoshi, Yamabe, Kikuo, Okushi, Hideyo, Yamasaki, Satoshi

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 669 KB

english, 2010

6

Roughening of atomically flat diamond (111) surfaces by a hot HNO3/H2SO4 solution

Tokuda, Norio, Umezawa, Hitoshi, Ri, Sung-Gi, Yamabe, Kikuo, Okushi, Hideyo, Yamasaki, Satoshi

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 314 KB

english, 2008

7

Atomically flat diamond (111) surface formation by homoepitaxial lateral growth

Tokuda, Norio, Umezawa, Hitoshi, Ri, Sung-Gi, Ogura, Masahiko, Yamabe, Kikuo, Okushi, Hideyo, Yamasaki, Satoshi

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 669 KB

english, 2008

8

[IEEE 21st International Reliability Physics Symposium - Phoenix, AZ, USA (1983.04.5-1983.04.7)] 21st International Reliability Physics Symposium - Thickness Dependence of Dielectric Breakdown Failure of Thermal SiO2 Films

Yamabe, Kikuo, Taniguchi, Kenji, Matsushita, Yoshiaki

Year:

1983

Language:

english

File:

PDF, 6.77 MB

english, 1983

9

[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Cathode electron injection breakdown model and work function dependent TDDB lifetime for high-k / metal gate stack pMOSFETs

Motoyuki Sato,, Kikuo Yamabe,, Kenji Shiraishi,, Seiichi Miyazaki,, Keisaku Yamada,, Ryu Hasunuma,, Takayuki Aoyama,, Yasuo Nara,, Yuzuru Ohji,

Year:

2008

Language:

english

File:

PDF, 258 KB

english, 2008

10

Effect of SiO[sub 2] Thickness on Dielectric Breakdown Defect Density Due to Surface Crystal-Originated Particles

Yamabe, Kikuo, Shimada, Yasuhiro, Piao, Min, Yamazaki, Tohru, Otsuki, Tsuyoshi, Takeda, Ryuji, Ohta, Yasumitsu, Jimbo, Susumu, Watanabe, Masaharu

Journal:

Journal of The Electrochemical Society

Year:

2003

Language:

english

File:

PDF, 201 KB

english, 2003

11

Mechanism of gate dielectric degradation by hydrogen migration from the cathode interface

Higashi, Yusuke, Takaishi, Riichiro, Kato, Koichi, Suzuki, Masamichi, Nakasaki, Yasushi, Tomita, Mitsuhiro, Mitani, Yuichiro, Matsumoto, Masuaki, Ogura, Shohei, Fukutani, Katsuyuki, Yamabe, Kikuo

Journal:

Microelectronics Reliability

Year:

2017

Language:

english

File:

PDF, 2.46 MB

english, 2017

12

Variance Reduction during the Fabrication of Sub-20 nm Si Cylindrical Nanopillars for Vertical Gate-All-Around Metal-Oxide-Semiconductor Field-Effect Transistors

Ye, Shujun, Yamabe, Kikuo, Endoh, Tetsuo

Journal:

Year:

2019

File:

PDF, 10.04 MB

2019

13

Structural studies of ultrathin silicon oxides and their interfaces by XPS

Takeo Hattori, Hiroaki Yamagishi, Noboru Koike, Keitaro Imai, Kikuo Yamabe

Journal:

Applied Surface Science

Year:

1989

Language:

english

File:

PDF, 359 KB

english, 1989

14

Protuberance growth at polysilicon surfaces during oxidation

Soichi Nadahara, Jun-ichi Shiozawa, Keitaro Imai, Kyoichi Suguro, Kikuo Yamabe

Journal:

Applied Surface Science

Year:

1989

Language:

english

File:

PDF, 437 KB

english, 1989

15

Fabrication of Cu nanowires along atomic step edge lines on Si(1 1 1) substrates

Norio Tokuda, Hidenobu Watanabe, Daisuke Hojo, Satoshi Yamasaki, Kazushi Miki, Kikuo Yamabe

Journal:

Applied Surface Science

Year:

2004

Language:

english

File:

PDF, 134 KB

english, 2004

16

Utilization of Si atomic steps for Cu nanowire fabrication

Ryu Hasunuma, Takanobu Yada, Junichi Okamoto, Daisuke Hojo, Norio Tokuda, Kikuo Yamabe

Journal:

Science and Technology of Advanced Materials

Year:

2005

Language:

english

File:

PDF, 162 KB

english, 2005

17

Direct observation of two-dimensional growth at SiO2/Si(111) interface

Daisuke Hojo, Norio Tokuda, Kikuo Yamabe

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.16 MB

english, 2007

18

Atomic-layer resolved monitoring of thermal oxidation of Si(001) by reflectance difference oscillation technique

Tetsuji Yasuda, Masayasu Nishizawa, Naoto Kumagai, Satoshi Yamasaki, Hitoshi Oheda, Kikuo Yamabe

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 228 KB

english, 2004

19

Microscopic Thickness Uniformity and Time-Dependent Dielectric Breakdown Lifetime Dispersion of Thermally Grown Ultrathin SiO 2 Film on Atomically Flat Si Surface

Hasunuma, Ryu, Hayashi, Yusuke, Ota, Masahiro, Yamabe, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

20

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Suppression of Leakage Current of Deposited SiO

Sometani, Mitsuru, Hasunuma, Ryu, Ogino, Masaaki, Kuribayashi, Hitoshi, Sugahara, Yoshiyuki, Yamabe, Kikuo

Year:

2009

Language:

english

File:

PDF, 1.68 MB

english, 2009

21

Modified Oxygen Vacancy Induced Fermi Level Pinning Model Extendable to P-Metal Pinning

Akasaka, Yasushi, Nakamura, Genji, Shiraishi, Kenji, Umezawa, Naoto, Yamabe, Kikuo, Ogawa, Osamu, Lee, Myoungbum, Amiaka, Toshio, Kasuya, Tooru, Watanabe, Heiji, Chikyow, Toyohiro, Ootsuka, Fumio, Nar

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 154 KB

english, 2006

22

Selective Growth of Ag Nanowires on Si(111) Surfaces by Electroless Deposition

Tokuda, Norio, Sasaki, Naoyuki, Watanabe, Hidenobu, Miki, Kazushi, Yamasaki, Satoshi, Hasunuma, Ryu, Yamabe, Kikuo

Journal:

Journal of Physical Chemistry B

Year:

2005

Language:

english

File:

PDF, 175 KB

english, 2005

23

Depth Profiling of Si-SiO 2 Interface Structures

Suzuki, Toshihisa, Muto, Masaaki, Hara, Motohiro, Yamabe, Kikuo, Hattori, Takeo

Journal:

Japanese Journal of Applied Physics

Year:

1986

File:

PDF, 1.27 MB

1986

24

[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Negatively charged deep level defects generated by Yttrium and Lanthanum incorporation into HfO2 for Vth adjustment, and the impact on TDDB, PBTI and 1/f noise

Sato, Motoyuki, Kamiyama, Satoshi, Sugita, Yoshihiro, Matsuki, Takeo, Morooka, Tetsu, Suzuki, Takayuki, Shiraishi, Kenji, Yamabe, Kikuo, Ohmori, Kenji, Yamada, Keisaku, Yugami, Jiro, Ikeda, Kazuto, Oh

Year:

2009

Language:

english

File:

PDF, 280 KB

english, 2009

25

[IEEE 2009 IEEE International Reliability Physics Symposium - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - Electron beam induced current investigation of stress-induced leakage and breakdown processes in high-k stacks

Chen, Jun, Sekiguchi, Takashi, Fukata, Naoki, Takase, Masami, Chikyow, Toyohiro, Hasunuma, Ryu, Yamabe, Kikuo, Sato, Motoyuki, Nara, Yasuo, Yamada, Keisaku

Year:

2009

Language:

english

File:

PDF, 1.81 MB

english, 2009

26

[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Reversible and irreversible degradation attributing to oxygen vacancy in HfSiON gate films during electrical stress application

Hasunuma, Ryu, Tamura, Chihiro, Nomura, Tsuyoshi, Kikuchi, Yuuki, Ohmori, Kenji, Sato, Motoyuki, Uedono, Akira, Chikyow, Toyohiro, Shiraishi, Kenji, Yamada, Keisaku, Yamabe, Kikuo

Year:

2009

Language:

english

File:

PDF, 272 KB

english, 2009

27

[sup 18]O[sub 2] isotope labeling studies of stress effect on oxidation kinetics

Imai, Keitaro, Yamabe, Kikuo

Journal:

Journal of Applied Physics

Year:

1998

Language:

english

File:

PDF, 377 KB

english, 1998

28

Vacancy-type defects in BaTiO[sub 3]/SrTiO[sub 3] structures probed by monoenergetic positron beams

Uedono, Akira, Shimoyama, Kazuo, Kiyohara, Masahiro, Chen, Zhi Quan, Yamabe, Kikuo, Ohdaira, Toshiyuki, Suzuki, Ryoichi, Mikado, Tomohisa

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 317 KB

english, 2002

29

Epitaxial growth of BaTiO[sub 3]/SrTiO[sub 3] structures on SrTiO[sub 3] substrate with automatic feeding of oxygen from the substrate

Shimoyama, Kazuo, Kiyohara, Masahiro, Kubo, Kousuke, Uedono, Akira, Yamabe, Kikuo

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 649 KB

english, 2002

30

Comparison of leakage behaviors in p- and n-type metal-oxide-semiconductor capacitors with hafnium silicon oxynitride gate dielectric by electron-beam-induced current

Chen, Jun, Sekiguchi, Takashi, Fukata, Naoki, Takase, Masami, Chikyo, Toyohiro, Yamabe, Kikuo, Hasunuma, Ryu, Sato, Motoyuki, Nara, Yasuo, Yamada, Keisaku

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 386 KB

english, 2008

31

Study of oxygen vacancies in SrTiO[sub 3] by positron annihilation

Uedono, Akira, Shimayama, Kazuo, Kiyohara, Masahiro, Chen, Zhi Quan, Yamabe, Kikuo

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 366 KB

english, 2002

32

Epitaxial Growth of BaTiO3 Thin Film on SrTiO3 Substrate in Ultra High Vacuum without Introducing Oxidant

Shimoyama, Kazuo, Kubo, Kousuke, Maeda, Tatsuro, Yamabe, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2001

Language:

english

File:

PDF, 77 KB

english, 2001

33

Degradation of Gate Oxide Reliability due to Plasma-Deposited Silicon Nitride

Ogino, Masaaki, Sugahara, Yoshiyuki, Kuribayashi, Hitoshi, Yamabe, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2004

File:

PDF, 933 KB

2004

34

Point defects in thin HfAlOx films probed by monoenergetic positron beams

Uedono, Akira, Mitsuhashi, Riichiro, Horiuchi, Atsushi, Torii, Kazuyoshi, Yamabe, Kikuo, Yamada, Keisaku, Suzuki, Ryouichi, Ohdaira, Toshiyuki, Mikado, Tomohisa

Journal:

MRS Proceedings

Year:

2003

Language:

english

File:

PDF, 118 KB

english, 2003

35

Vacancy-Type Defects in SrTiO3 Probed by a Monoenergetic Positron Beam

Uedono, Akira, Kiyohara, Masahiro, Shimoyama, Kazuo, Matsunaga, Yusuke, Yasui, Nobuyuki, Yamabe, Kikuo

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 306 KB

english, 2004

36

Sintering of Alumina/Zirconia Composite Powders Prepared by the Coprecipitation Technique

Kume, H., Nishikawa, Yoshito, Inamura, S., Miyamoto, Hiroki, Yamabe, Kikuo, Maeda, Tomoyuki

Journal:

Key Engineering Materials

Year:

1999

File:

PDF, 542 KB

1999

37

Nonuniform Distribution of Trapped Charges in Electron Injection Stressed SiO[sub 2] Films

Yamabe, Kikuo, Liao, Kai, Minemura, Hiroaki, Murata, Masahide

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 65 KB

english, 2001

38

Electron-Beam-Induced Current Study of Breakdown Behavior of High-K Gate MOSFETs

Chen, Jun, Sekiguchi, Takashi, Takase, Masami, Fukata, Naoki, Hasunuma, Ryu, Yamabe, Kikuo, Sato, Motoyuki, Yamada, Keisaku, Chikyo, Toyohiro

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 948 KB

english, 2009

39

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - (Invited) Negatively Charged Defects Generated by Rare-Earth Materials Incorporation into HfO

Sato, Motoyuki, Kamiyama, Satoshi, Sugita, Yoshihiro, Matsuki, Takeo, Morooka, Tetsu, Suzuki, Takayuki, Shiraishi, Kenji, Yamabe, Kikuo, Yugami, Jiro, Ikeda, Kazuto, Ohji, Yuzuru, Ohmori, Kenji, Yamad

Year:

2010

Language:

english

File:

PDF, 330 KB

english, 2010

40

Gettering of Iron Using Electrically Inactive Boron Doped Layer

Tomita, Hiroshi, Saito, Mami, Yamabe, Kikuo

Journal:

Materials Science Forum

Year:

1995

File:

PDF, 365 KB

1995

41

Local Dielectric Degradation of Cu-Contaminated SiO2 Thin Films

Tokuda, Norio, Nishiguchi, Shingo, Yamasaki, Satoshi, Miki, Kazushi, Yamabe, Kikuo

Journal:

Solid State Phenomena

Year:

2004

Language:

english

File:

PDF, 545 KB

english, 2004

42

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Role of the Ionicity in Defect Formation in Hf-Based Dielectrics

Umezawa, Naoto, Shiraishi, Kenji, Miyazaki, Seiichi, Uedono, Akira, Akasaka, Yasushi, Inumiya, Seiji, Oshiyama, Atsushi, Hasunuma, Ryu, Yamabe, Kikuo, Momida, Hiroyoshi, Ohno, Takahisa, Ohmori, Kenji,

Year:

2007

Language:

english

File:

PDF, 328 KB

english, 2007

43

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Wide Controllability of Flatband Voltage in La2O3 Gate Stack Structures - Remarkable Advantages of La2O3 over HfO2 -

Ohmori, Kenji, Ahmet, Parhat, Shiraishi, Kenji, Yamabe, Kikuo, Watanabe, Heiji, Akasaka, Yasushi, Umezawa, Naoto, Nakajima, Kiyomi, Yoshitake, Michiko, Nakayama, Takashi, Chang, Kao-Shuo, Kakushima, K

Year:

2006

Language:

english

File:

PDF, 340 KB

english, 2006

44

A Long-Term Reliability of Thermal Oxides Grown on n-Type 4H-SiC Wafer

Senzaki, Junji, Goto, M., Kojima, Kazutoshi, Yamabe, Kikuo, Fukuda, Kenji

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 356 KB

english, 2004

45

SiO 2 Surface and SiO 2 /Si Interface Topography Change by Thermal Oxidation

Tokuda, Norio, Murata, Masahide, Hojo, Daisuke, Yamabe, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2001

Language:

english

File:

PDF, 428 KB

english, 2001

46

Two-Dimensional Roughness Growth at Surface and Interface of SiO2 Films during Thermal Oxidation of 4H-SiC(0001)

Hasunuma, Ryu, Fukasawa, Tatsuya, Kosugi, Ryouji, Ishida, Yuuki, Yamabe, Kikuo

Journal:

Materials Science Forum

Year:

2012

Language:

english

File:

PDF, 521 KB

english, 2012

47

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - (Invited) Degradation in HfSiON Film Induced by Electrical Stress Application

Hasunuma, Ryu, Tamura, Chihiro, Nomura, Tsuyoshi, Kikuchi, Yuuki, Ohmori, Kenji, Sato, Motoyuki, Uedono, Akira, Chikyow, Toyohiro, Shiraishi, Kenji, Yamada, Keisaku, Yamabe, Kikuo

Year:

2010

Language:

english

File:

PDF, 453 KB

english, 2010

48

Evaluation of Kink Generation Rate and Step Flow Velocity on Si(111) during Wet Etching

Hasunuma, Ryu, Yamabe, Kikuo

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 2.35 MB

english, 2013

49

Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal–oxide–semiconductor capacitors

Sato, Soshi, Hiroi, Yuki, Yamabe, Kikuo, Kitabatake, Makoto, Endoh, Tetsuo, Niwa, Masaaki

Journal:

Japanese Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.01 MB

english, 2014

50

Studies on the Synthesis of Chemotherpeutics. Part XI. Synthesis and Antibacterial Activities of Phosphonopeptides

Kametani, Tetsuji, Kigasawa, Kazuo, Hiiragi, Mineharu, Wakisaka, Kikuo, Haga, Seiji, Sugi, Hideo, Tanigawa, Keizo, Suzuki, Yukio, Fukawa, Kazunaga, Irino, Osamu, Saita, Osamu, Yamabe, Shigeru

Journal:

Year:

1981

Language:

english

File:

PDF, 726 KB

english, 1981